Tetrakis(ethylmethylamido)titanium(IV) 四(乙基甲基胺基)钛(IV)

CAS 308103-54-0 MFCD00799591

化学结构图

308103-54-0
SMILES: CN(CC)[Ti](N(C)CC)(N(C)CC)N(C)CC

化学属性

Mol. Formula[(CH3C2H5)N]4Ti
Mol. Weight280.28
Boiling Point80 °C/0.1 mmHg(lit.)
Density0.923 g/mL at 25 °C(lit.)
Appearance yellow to orange liq.
Stabilitymoisture sensitive

别名和识别编码

Chemical NameTetrakis(ethylmethylamino)titanium, 99% (99.99%-Ti) PURATREM
Synonym 四(乙基甲基氨基)钛(IV) 四(乙基甲基胺基)钛(IV)
PubChem Substance ID24870915
MDL NumberMFCD00799591
Chemical Name Translation四(乙基甲基胺基)钛(IV)
CAS Number308103-54-0
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分类

  • {SA} CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics, Titanium, Vapor Deposition Precursors
  • {SNA} CVD and ALD Precursors by Metal, Micro/NanoElectronics, Titanium, Vapor Deposition Precursors, 材料科学

安全信息

GHS Symbol
WGK Germany3
Hazard statements
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H260 In contact with water releases flammable gases which may ignite spontaneously 与水接触时释放可燃气体，可自燃。
  • H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Precautionary statements
  • P223 Keep away from any possible contact with water, because of violent reaction and possible flash fire. 远离任何与水接触的可能，因为会剧烈反应可能产生闪火。
  • P422 Store contents under… 存储目录在…之下。
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
  • P370+P378
Signal word Danger
Safety Statements
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）；
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水”
  • S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
Hazard Codes F,C
Risk Statements
  • R11 Highly flammable 非常易燃
  • R14 Reacts violently with water 遇水会猛烈反应
  • R34 Causes burns 会导致灼伤

系列性分类

  1. CVD & ALD Precursors
  2. Titanium

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