Tetrakis(ethylmethylamino)hafnium(IV) TEMAH 四(乙基甲基氨基)铪(IV)

CAS 352535-01-4 MFCD03427130

化学结构图

352535-01-4
SMILES: CCN(C)[Hf](N(C)CC)(N(C)CC)N(C)CC

化学属性

Mol. Formula[(CH3)(C2H5)N]4Hf
Mol. Weight410.90
Boiling Point78 °C/0.01 mmHg(lit.)
Density1.324 g/mL at 25 °C(lit.)
Melting Point<;-50 °C
Flash Point11°(52°F)
TSCAYes
Appearance colorless to yellow liq.
Stabilitymoisture sensitive
Danger-Level-
pH-:-
Redox-

别名和识别编码

Chemical NameTetrakis(ethylmethylamino)hafnium(IV) TEMAH
Synonym TEMAH TEMAH 四(乙基甲基氨基)铪(IV) 四(乙基甲基胺基)铪(IV) 四(乙基甲基氨基)铪(IV)
CAS Number352535-01-4
PubChem Substance ID329764168
MDL NumberMFCD03427130
Chemical Name Translation四(乙基甲基氨基)铪(IV)
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分类

  • {SNA} CVD and ALD Precursors by Metal, Hafnium, Micro/NanoElectronics, Vapor Deposition Precursors, 材料科学
  • {SNA} CVD and ALD Precursors by Metal, Hafnium, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors
  • {SNA} 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Hafnium,
  • {SNA} 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Hafnium, Micro/NanoElectronics, Vapor Deposition Precursors, 材料科学
  • {SNA} 72: Hafnium,

相关文献及参考

  • Rose, M.; Niinisto, J.; Endler, I.; Bartha, J. W.; Kucher, P.; Ritala, M. ACS Appl. Mat. Inter. 2 , 347, (2010) 摘要

安全信息

GHS Symbol
WGK Germany3
Hazard Codes F,Xi
Hazard statements
  • H315 Causes skin irritation 会刺激皮肤
  • H335 May cause respiratory irritation 可能导致呼吸道刺激
  • H319 Causes serious eye irritation 严重刺激眼睛
  • H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
  • H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
Personal Protective Equipment Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Precautionary statements
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
  • P305+P351+P338
  • P422 Store contents under… 存储目录在…之下。
  • P231+P232
  • P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
Signal word Danger
Safety Statements
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后,立即用大量水冲洗并征求医生意见;
  • S30 Never add water to this product 切勿将水加入该产品中;
  • S37 Wear suitable gloves 戴适当手套;
  • S16 Keep away from sources of ignition - No smoking 远离火源,禁止吸烟;
  • S36 Wear suitable protective clothing 穿戴适当的防护服;
Packing GroupII
UN Number UN3399
Risk Statements
  • R11 Highly flammable 非常易燃
  • R36/37/38 Irritating to eyes, respiratory system and skin 对眼睛、呼吸系统和皮肤有刺激性
  • R14 Reacts violently with water 遇水会猛烈反应
Storage condition Air & Moisture Sensitive
Restrict 危险品

系列性分类


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