Tetrakis(Ethylmethylamido)Zirconium(Iv) TEMAZ 四(甲乙氨基)锆(IV)
CAS 175923-04-3 MFCD03427131
化学结构图
SMILES: CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC
化学属性
| Mol. Formula | Zr(NCH3C2H5)4 |
|---|---|
| Mol. Weight | 323.63 |
| Boiling Point | 81 °C/0.1 mmHg(lit.) |
| Density | 1.049 g/mL at 25 °C(lit.) |
| Flash Point | 10°(50°F) |
| TSCA | No |
| Appearance | light yellow liq. |
| Stability | moisture sensitive |
| Danger-Level | - |
| pH | -:- |
| Redox | - |
别名和识别编码
| Chemical Name | Tetrakis(Ethylmethylamido)Zirconium(Iv) TEMAZ |
|---|---|
| Synonym | TEMAZ 四(乙基甲基胺基)锆(IV) 四(乙基甲基氨基)锆(IV) Tetrakis(diethylamido)zirconium(IV) TEMAZ 四(乙基甲基氨基)锆(IV) |
| CAS Number | 175923-04-3 |
| PubChem Substance ID | 4446313 |
| MDL Number | MFCD03427131 |
| Chemical Name Translation | 四(甲乙氨基)锆(IV) |
| LabNetwork Molecule ID | LN02144069 |
| InChI | InChI=1S/4C3H8N.Zr/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4 |
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分类
- {SNA} 40: Zirconium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry,
- {SNA} 40: Zirconium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Vapor Deposition Precursors, Zirconium, 材料科学
- {SNA} 40: Zirconium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors, Zirconium
- {SA} 40: Zirconium, CVD and ALD Precursors Packaged for Deposition Systems,
- {SNA} CVD and ALD
相关文献及参考
- Won, S-J.; Kim, J-Y.; Choi, G-J.; Heo, J.; Hwang, C. S.; Kim, H. J. Mater. Chem. 21 , 4374, (2009)
安全信息
GHS Symbol
- H315 Causes skin irritation 会刺激皮肤
- H335 May cause respiratory irritation 可能导致呼吸道刺激
- H319 Causes serious eye irritation 严重刺激眼睛
- H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
- H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
- P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
- P305+P351+P338
- P422 Store contents under… 存储目录在…之下。
- P231+P232
- P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
- S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
- S30 Never add water to this product 切勿将水加入该产品中；
- S37 Wear suitable gloves 戴适当手套；
- S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
- S36 Wear suitable protective clothing 穿戴适当的防护服；
- R11 Highly flammable 非常易燃
- R36/37/38 Irritating to eyes, respiratory system and skin 对眼睛、呼吸系统和皮肤有刺激性
- R14 Reacts violently with water 遇水会猛烈反应
- R14/15 Reacts violently with water, liberating extremely flammable gases 遇水剧烈反应，释放出高度可燃气体
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